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KMID : 0381920070370020111
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Korean Journal of Microscopy
2007 Volume.37 No. 2 p.111 ~ p.121
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Measurement of Spherical Aberration Coefficient of the Objective Lens in KBSI-HVEM
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Kim Young-Min
Shim Hyo-Sik
Kim Youn-Joong
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Abstract
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Coefficient of spherical aberration of the objective lens in the KBSI-HVEM was evaluated by diffractogram
method. Instrumental resolution was also discussed with this method. In order to improve the accuracy, digital
processing and graphical curve fitting for intensity profile of diffractogram were employed. Experimental
concerns where the optimal procedure of the measurement can be accomplished for this study were discussed.
The spherical aberration coefficient (Cs) was estimated to be 2.628±0.04 mm from this study, which was
almost coincident with the value of the manufacture’s suggestion (Cs=2.65 mm).
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KEYWORD
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Spherical aberration coefficient, Cs, Objective lens, High voltage electron microscope (HVEM)
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